Flat Sheet Membrane Systems for Semiconductor Manufacturing

denis7884
Nov 17
3 min read

Updated: Nov 20

Semiconductor fabrication depends on ultrapure water (UPW), with nearly 40% used for rinsing and cleaning that produces CMP wastewater containing submicron solids, solvents, and heavy metals. With COD levels often reaching 3,000–5,000 mg/L, this effluent exceeds conventional treatment limits and creates challenges for membrane R&D. MEMS provides end-to-end membrane fabrication systems that give labs precise process control and support reproducible material evaluation.

Rising Demand for Clean and Sustainable Filtration in Semiconductor Manufacturing

Semiconductor fabrication relies on ultrapure water (UPW) as a critical process medium. Each wafer passes through a series of precision operations including mechanical and electrical bonding, protective encapsulation and surface refinement, where even trace particulate or ionic contamination can cause defects. Nearly 40% of ultrapure water is consumed in rinsing and cleaning, generating chemical mechanical polishing wastewater (CMPW) rich in submicron solids, solvents and heavy metals such as nickel, lead and copper.

The chemical oxygen demand (COD) of this effluent often reaches 3,000–5,000 mg/L, with suspended submicron silicon particles and etching residues that exceed the limits of conventional treatment systems. These conditions create significant challenges for membrane development in R&D laboratories. MEMS provides end-to-end production systems that give laboratories precise control over every stage of membrane fabrication, supporting reproducible results and accelerating material evaluation.

Challenges in Membrane Production for Semiconductor Effluent

🧫 Fouling from High Solids and CMP Slurry

The chemical mechanical polishing process (CMPP) and wafer grinding produce CMPW with high concentrations of silicon particles and abrasive media, often exceeding 1,000 mg/L. This leads to rapid flux decline and unstable pressure behavior. Frequent chemical cleaning alters the membrane surface, reducing reproducibility. Laboratory studies on polymer composition or surface modification often yield inconsistent results without proper control. Stable operation requires membranes that maintain permeability under heavy solids loading and systems that preserve hydraulic stability over extended periods (HRT).

⚗️ Chemical Degradation under Harsh Conditions

Etching and surface preparation introduce oxidants and acids such as tetramethylammonium hydroxide (TMAH), that degrade polymeric membranes. Oxidation and hydrolysis reduce selectivity and mechanical integrity. Frequent replacement increases cost and disrupts research schedules. Ceramic membranes resist chemical attack but are difficult to modify for laboratory formulation studies. The lack of adaptable and chemically stable materials limits research flexibility and slows material advancement.

🏗️ Fragmented and Non-Scalable Research Infrastructure

Conventional membrane manufacturing setups are built for production, not experimentation. Casting, coating and module assembly often occur in separate facilities without process linkage. Researchers have limited ability to connect membrane formulation parameters with filtration performance under consistent conditions. The absence of a unified workflow restricts process optimization and delays pilot-scale verification.

MEMS End-to-End Systems for Membrane Research

Overcoming these challenges requires an integrated research environment that links every stage of membrane development. MEMS addresses these gaps by providing a unified suite of instruments designed for precise control, consistent results and accelerated material innovation.

Flat Sheet Membrane Casting System

The flat sheet casting system provides precise control of membrane morphology through adjustable thickness, solvent exchange rate and temperature regulation. The integrated coagulation bath produces consistent pore structures and stable mechanical properties. The system accommodates diverse polymer matrices and additives suitable for CMPW with high COD and abrasive particulates.

Core Advantages

Scalable operation suitable for pre-commercial membrane development
Continuous roll-to-roll casting mechanism for consistent film formation Integrated heat exchange control for thermal uniformity
Compact configuration suitable for R&D labs

Flat Sheet Membrane Coating System

The coating system deposits uniform selective layers through a controlled dip coating process. The integrated drying oven supports temperature-controlled polymerization and consistent coating quality. The enclosed chamber minimizes exposure to oxidants and acids (e.g., TMAH).

Flat sheet membrane coating machine by MEMS, designed for precise polymer coating using a dip-coating process followed by reaction and drying stages to ensure uniform layer deposition for research and pilot-scale production. — Image 2: Flat Sheet Coating System

Core Advantages

Precise and repeatable surface coating for accurate material evaluation
Controlled drying and polymerization for stable membrane properties
Flexible configuration for R&D labs and pilot-scale operation
Automated material handling for efficient workflow continuity

Spiral-Wound Membrane Assembly System

The spiral-wound assembly system replicates industrial filtration performance within a compact research platform. Winding precision maintains uniform tension and alignment for reproducible module fabrication. The system includes automated adhesive application and curing to achieve consistent bonding quality. Process variables are monitored and adjusted through programmable control with a human–machine interface (HMI).

Spiral wound system by MEMS that automates membrane rolling, adhesive application, and curing to produce high-quality spiral-wound elements for filtration applications. — Image 3: Spiral Wound Rolling and Trimming System

Core Advantages

Consistent membrane rolling and uniform element structure
Automated adhesive application and curing for stable module integrity
Centralized process control for real-time parameter monitoring and data collection

From Material to Module: A Connected Path of Discovery

Semiconductor manufacturing produces vast quantities of chemically complex wastewater that pose serious environmental challenges. Such wastewater requires membranes that can withstand fouling, chemical degradation and mechanical stress. Achieving these properties requires an unbroken research chain linking casting, coating and assembly.

The MEMS system unifies these processes into a single controllable environment, where every variable, from polymer formulation to module winding, can be precisely traced. This integration transforms membrane research from isolated trials into a coherent, data-rich process that accelerates material innovation and bridges the gap between laboratory results and industrial validation.